Thermoelastic Damping in MEMS Gyroscopes at High Frequencies

Microelectromechanical systems (MEMS) gyroscopes are widely used, e.g. in modern automotive and consumer applications, and require signal stability and accuracy in rather harsh environmental conditions. In many use cases, device reliability must be guaranteed under large external loads at high frequencies. The sensitivity of the sensor to such external loads depends strongly on the damping, or rather quality factor, of the high frequency mechanical modes of the structure. In this paper, we investigate the influence of thermoelastic damping on several high frequency modes by comparing finite element simulations with measurements of the quality factor in an application-relevant temperature range. We measure the quality factors over different temperatures in vacuum, to extract the relevant thermoelastic material parameters of the polycrystalline MEMS device. Our simulation results show a good agreement with the measured quantities, therefore proving the applicability of our method for predictive purposes in the MEMS design process. Overall, we are able to uniquely identify the thermoelastic effects and show their significance for the damping of the high frequency modes of an industrial MEMS gyroscope. Our approach is generic and therefore easily applicable to any mechanical structure with many possible applications in nano- and micromechanical systems

The retarding Bessel Box an electron spectrometer designed for pump probe experiments

A new type of electrostatic electron spectrometer is developed, capable of particular sensitive measurements of energy spectra and time of flight distributions. This instrument is specifically designed and optimized for laser pump X ray probe measurements, where photo electrons or Auger electrons from surfaces, clusters, molecular or atomic targets are being measured with high time resolution at an extremely low detection noise level. The compact and robust cylinder symmetrical system is a strongly improved Bessel Box design, featuring electron retardation, a large detection solid angle, about 100 electron transmission gridless design and excellent time resolution. In this paper we describe the principle of operation of this type of spectrometer and various tests. We present quantitative results for electron measurements with different solid state targets and two different electron detection systems in comparison to electron trajectory simulations inside the electrostatic spectrometer fields. Picosecond pump probe operation has been tested with high laser power and even the ability to work under femtosecond pump probe conditions with electron detection at the BESSY II slicing facility has been prove

Femtosecond dynamics snapshots of the early ion track evolution

The energy dissipation and femtosecond dynamics due to fast heavy ions in matter is critically reviewed with emphasis on possible mechanisms that lead to materials modi cations. Starting from a discussion of the initial electronic energy deposition processes, three basic mechanisms for the conversion of electronic into atomic energy are investigated by means of Auger electron spectroscopy. Results for amorphous Si, amorphous C and polypropylene are presented and discussed. Experimental evidence for a highly charged track region as well as for hot electrons inside tracks is shown. As follows mainly from Auger electron spectroscopy, there are strong indications for di erent track production mechanisms in di erent material

Query processing of spatial objects: Complexity versus Redundancy

The management of complex spatial objects in applications, such as geography and cartography, imposes stringent new requirements on spatial database systems, in particular on efficient query processing. As shown before, the performance of spatial query processing can be improved by decomposing complex spatial objects into simple components. Up to now, only decomposition techniques generating a linear number of very simple components, e.g. triangles or trapezoids, have been considered. In this paper, we will investigate the natural trade-off between the complexity of the components and the redundancy, i.e. the number of components, with respect to its effect on efficient query processing. In particular, we present two new decomposition methods generating a better balance between the complexity and the number of components than previously known techniques. We compare these new decomposition methods to the traditional undecomposed representation as well as to the well-known decomposition into convex polygons with respect to their performance in spatial query processing. This comparison points out that for a wide range of query selectivity the new decomposition techniques clearly outperform both the undecomposed representation and the convex decomposition method. More important than the absolute gain in performance by a factor of up to an order of magnitude is the robust performance of our new decomposition techniques over the whole range of query selectivity

Asymmetric line shapes for medium energy H and He ions undergoing a large angle collision

Asymmetric line shapes for medium energy H and He ions backscattered from topmost adatoms such as Si 111 3x 3 Sb and Ni 111 2x2 O are measured by a toroidal electrostatic analyzer with an excellent energy resolution. The spectra exhibit a pronounced asymmetric nature and are well fitted by an exponentially modified Gaussian profile. It is found that the nonperturbative coupled channel calculations reproduce well the observed asymmetric line shapes for He impact on different materials, although slightly overestimate the asymmetry for H impact on Au. On the other hand, the CASP 3.2 program involving additional approximations gives large underestimates for He ions and overestimates for H ions. This problem has been partially solved by modifying the order of the implementation of the shell corrections and higher order effects in the CASP mode

Search for short time phase effects in the electronic damage evolution A case study with silicon

This work focusses on the production and decay properties of inner shell vacancies and valence band excitations induced by swift highly charged ions interacting with amorphous and crystalline Si. High resolution electron spectra have been taken for fast heavy ions at 1.78 5 MeV u as well as for electrons of similar velocity incident on atomically clean Si targets of well defined phase. Various Augerelectron structures are analyzed concerning their width, their intensity and exact peak position. All measured peaks show a small shift towards lower energy when the charge of the projectile is increased. This finding is an indication for a nuclear track potential inside the ion track. A detailed analysis of the Auger electron spectra for amorphous Si and crystalline Si 111 7 x 7 points to a small but significant phase effect in the short time dynamics of ion track

High energy ion beam irradiation of Co NiFe Co Cu multilayers Effects on the structural, transport and magnetic properties

The aim of this work is to investigate the effects of 593 MeVAu irradiation using two different projectile charges, namely Au30 and Au46.3 on the structural, transport and magnetization properties of Co NiFe Co Cu multilayers. X Ray diffraction and extended X ray absorption fine structures measurements show no significant structural change for as deposited and irradiated multilayers. On the other hand, the magnetoresistance amplitude decreases with the ion fluence but it is insensitive to the projectile charge state. The correlation between changes in the magnetoresistance and remanent magnetization suggests that the main effect responsible for the decrease of the magnetoresistance is the creation of ferromagnetic pinholes. These results are discussed on basis of the electronic thermal spike model and nuclear cascades theory and show similarities to the effects observed at low energy ion beam irradiatio

Interatomic-Coulombic-decay-induced recapture of photoelectrons in helium dimers

We investigate the onset of photoionization shakeup induced interatomic Coulombic decay (ICD) in He2 at the He+*(n = 2) threshold by detecting two He+ ions in coincidence. We find this threshold to be shifted towards higher energies compared to the same threshold in the monomer. The shifted onset of ion pairs created by ICD is attributed to a recapture of the threshold photoelectron after the emission of the faster ICD electron.Comment: 5 Pages, 2 Figure